TY  - BOOK
AU  - Harding, Kevin, ed.
TI  - Dimensional Optical Metrology and Inspection for Practical Applications II
T2  - Proceedings of SPIE; V. 8839
SN  - 9780819496898 (Print)
PY  - 2013///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8839
ER  -