00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245008800116260003200204300002000236490003300256856010300289IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819496898 (Print)  cIIA Library  aHarding, Kevin, ed. 0aDimensional Optical Metrology and Inspection for Practical Applications IIh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8839  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8839yClick Here to Access eBook