TY  - BOOK
AU  - Harding, Kevin, ed.
TI  - Dimensional Optical Metrology and Inspection for Practical Applications
T2  - Proceedings of SPIE; V. 8133
SN  - 9780819487438 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8133
ER  -