00535nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245008500116260003200201300002000233490003300253856010300286IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819487438 (Print)  cIIA Library  aHarding, Kevin, ed. 0aDimensional Optical Metrology and Inspection for Practical Applicationsh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 8133  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8133yClick Here to Access eBook