TY  - BOOK
AU  - Pluta, Maksymilian, ed.
TI  - Diffractometry and Scatterometry
T2  - Proceedings of SPIE; V. 1991
SN  - 9780819412409 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1991
ER  -