00500nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245004600120260003200166300002000198490003300218856010300251IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819412409 (Print)  cIIA Library  aPluta, Maksymilian, ed. 0aDiffractometry and Scatterometryh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 1991  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1991yClick Here to Access eBook