TY  - BOOK
AU  - Tan, Hark Hoe, ed.
TI  - Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
T2  - Proceedings of SPIE; V. 6800
SN  - 9780819469717 (Print)
PY  - 2007///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6800
ER  -