00555nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245010600115260003200221300002000253490003300273856010300306IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819469717 (Print)  cIIA Library  aTan, Hark Hoe, ed. 0aDevice and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IVh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6800  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6800yClick Here to Access eBook