Tan, Hark Hoe, ed. <br/><br/>
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV  [eBook] 

 - Washington, USA  SPIE  2007 
 - Online resource 
 - Proceedings of SPIE; V. 6800 .
<br/><br/><label>ISBN: </label>9780819469717 (Print)