@book{24650,
	author = {Tan, Hark Hoe, ed.},
	title = {Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6800},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6800}
}