TY  - BOOK
AU  - Chiao, Jung-Chih, ed.
TI  - Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
T2  - Proceedings of SPIE; V. 6037
SN  - 9780819460684 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6037
ER  -