Chiao, Jung-Chih, ed. <br/><br/>
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV  [eBook] 

 - Washington, USA  SPIE  2006 
 - Online resource 
 - Proceedings of SPIE; V. 6037 .
<br/><br/><label>ISBN: </label>9780819460684 (Print)