TY  - BOOK
AU  - Chiao, Jung-Chih, ed.
TI  - Device and Process Technologies for MEMS, Microelectronics, and Photonics III
T2  - Proceedings of SPIE; V. 5276
SN  - 9780819451699 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5276
ER  -