00545nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245009100118260003400209300002000243490003300263856010300296IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819451699 (Print)  cIIA Library  aChiao, Jung-Chih, ed. 0aDevice and Process Technologies for MEMS, Microelectronics, and Photonics IIIh[eBook]  aWashington, USAbSPIEc2004    aOnline resource  aProceedings of SPIE; V. 5276  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5276yClick Here to Access eBook