Chiao, Jung-Chih, ed. <br/><br/>
Device and Process Technologies for MEMS, Microelectronics, and Photonics III  [eBook] 

 - Washington, USA  SPIE  2004   
 - Online resource 
 - Proceedings of SPIE; V. 5276 .
<br/><br/><label>ISBN: </label>9780819451699 (Print)