@book{24648,
	author = {Chiao, Jung-Chih, ed.},
	title = {Device and Process Technologies for MEMS, Microelectronics, and Photonics III},
	publisher = {SPIE},
	year = {2004  },
	series = {Proceedings of SPIE; V. 5276},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5276}
}