TY  - BOOK
AU  - Chiao, Jung-Chih, ed.
TI  - Device and Process Technologies for MEMS and Microelectronics II
T2  - Proceedings of SPIE; V. 4592
SN  - 9780819443229 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4592
ER  -