00530nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245007800118260003200196300002000228490003300248856010300281IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819443229 (Print)  cIIA Library  aChiao, Jung-Chih, ed. 0aDevice and Process Technologies for MEMS and Microelectronics IIh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4592  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4592yClick Here to Access eBook