Chiao, Jung-Chih, ed. <br/><br/>
Device and Process Technologies for MEMS and Microelectronics II  [eBook] 

 - Washington, USA  SPIE  2001 
 - Online resource 
 - Proceedings of SPIE; V. 4592 .
<br/><br/><label>ISBN: </label>9780819443229 (Print)