@book{24647,
	author = {Chiao, Jung-Chih, ed.},
	title = {Device and Process Technologies for MEMS and Microelectronics II},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4592},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4592}
}