TY  - BOOK
AU  - Chau, Kevin, ed.
TI  - Device and Process Technologies for MEMS and Microelectronics
T2  - Proceedings of SPIE; V. 3892
SN  - 9780819434937 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3892
ER  -