00522nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245007500113260003200188300002000220490003300240856010300273IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819434937 (Print)  cIIA Library  aChau, Kevin, ed. 0aDevice and Process Technologies for MEMS and Microelectronicsh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3892  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3892yClick Here to Access eBook