@book{24646,
	author = {Chau, Kevin, ed.},
	title = {Device and Process Technologies for MEMS and Microelectronics},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3892},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3892}
}