00737nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002700092245006200119260003200181300002000213490003300233856010300266942000700369999001700376952016200393IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892522507 (Print)  cIIA Library  aDey, James, ed.942882 0aDevelopments in Semiconductor Microlithography Vh[eBook]  aWashington, USAbSPIEc1980  aOnline resource  aProceedings of SPIE; V. 0221  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0221yClick Here to Access eBook  cEB  c24634d24634  00104070aBANbBANd2011-07-01eSPIEhV. 221l0pEB4094r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0221w2021-11-05yEB