TY  - BOOK
AU  - Giffin, James, ed.
TI  - Developments in Semiconductor Microlithography
T2  - Proceedings of SPIE; V. 0080
SN  - 9780892521074 (Print)
PY  - 1976///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0080
ER  -