@book{24592,
	author = {Yuan, Chi-Min, ed.},
	title = {Design-Process-Technology Co-optimization for Manufacturability XIV},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11328},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11328}
}