TY - BOOK AU - Cain, Jason, ed. TI - Design-Process-Technology Co-optimization for Manufacturability XIII T2 - Proceedings of SPIE; V. 10962 SN - 9781510625716 (Print) PY - 2019/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10962 ER -