00570nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245008200140260003200222300002000254490003400274856010400308IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510625716 (Print)  a9781510625723 (Online)  cIIA Library  aCain, Jason, ed. 0aDesign-Process-Technology Co-optimization for Manufacturability XIIIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10962  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10962yClick Here to Access eBook