@book{24591,
	author = {Cain, Jason, ed.},
	title = {Design-Process-Technology Co-optimization for Manufacturability XIII},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 10962},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10962}
}