00573nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002600119245008000145260003200225300002000257490003400277856010400311IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510607477 (Print)  a9781510607484 (Online)  cIIA Library  aCapodieci, Luigi, ed. 0aDesign-Process-Technology Co-optimization for Manufacturability XIh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10148  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10148yClick Here to Access eBook