@book{24589,
	author = {Capodieci, Luigi, ed.},
	title = {Design-Process-Technology Co-optimization for Manufacturability XI},
	publisher = {SPIE},
	year = {2017},
	series = {Proceedings of SPIE; V. 10148},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10148}
}