TY  - BOOK
AU  - Capodieci, Luigi, ed.
TI  - Design-Process-Technology Co-optimization for Manufacturability X
T2  - Proceedings of SPIE; V. 9781
SN  - 9781510600164 (Print)
PY  - 2016///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9781
ER  -