00531nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245007900118260003200197300002000229490003300249856010300282IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510600164 (Print)  cIIA Library  aCapodieci, Luigi, ed. 0aDesign-Process-Technology Co-optimization for Manufacturability Xh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9781  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9781yClick Here to Access eBook