@book{24586,
	author = {Sturtevant, John, ed.},
	title = {Design-Process-Technology Co-optimization for Manufacturability IX},
	publisher = {SPIE},
	year = {2015},
	series = {Proceedings of SPIE; V. 9427},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9427}
}