00526nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245007300119260003200192300002000224490003300244856010300277IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819445186 (Print)  cIIA Library  aCourtois, Bernard, ed. 0aDesign, Test, Integration, and Packaging of MEMS/MOEMS 2002h[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4755  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4755yClick Here to Access eBook