TY  - BOOK
AU  - Courtois, Bernard, ed.
TI  - Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
T2  - Proceedings of SPIE; V. 4408
SN  - 9780819441096 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4408
ER  -