TY  - BOOK
AU  - Courtois, Bernard, ed.
TI  - Design, Test, Integration, and Packaging of MEMS/MOEMS
T2  - Proceedings of SPIE; V. 4019
SN  - 9780819436450 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4019
ER  -