Courtois, Bernard, ed. <br/><br/>
Design, Test, Integration, and Packaging of MEMS/MOEMS  [eBook] 

 - Washington, USA  SPIE  2000 
 - Online resource 
 - Proceedings of SPIE; V. 4019 .
<br/><br/><label>ISBN: </label>9780819436450 (Print)