@book{24583,
	author = {Courtois, Bernard, ed.},
	title = {Design, Test, Integration, and Packaging of MEMS/MOEMS},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4019},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4019}
}