TY  - BOOK
AU  - Ehrfeld, Wolfgang, ed.
TI  - Design, Test, and Microfabrication of MEMS and MOEMS
T2  - Proceedings of SPIE; V. 3680
SN  - 9780819431547 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3680
ER  -