Ehrfeld, Wolfgang, ed. <br/><br/>
Design, Test, and Microfabrication of MEMS and MOEMS  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3680 .
<br/><br/><label>ISBN: </label>9780819431547 (Print)