@book{24582,
	author = {Ehrfeld, Wolfgang, ed.},
	title = {Design, Test, and Microfabrication of MEMS and MOEMS},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3680},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3680}
}