TY  - BOOK
AU  - Starikov, Alexander, ed.
TI  - Design, Process Integration, and Characterization for Microelectronics
T2  - Proceedings of SPIE; V. 4692
SN  - 9780819444394 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4692
ER  -