00539nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245008400121260003200205300002000237490003300257856010300290IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819444394 (Print)  cIIA Library  aStarikov, Alexander, ed. 0aDesign, Process Integration, and Characterization for Microelectronicsh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4692  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4692yClick Here to Access eBook