@book{24580,
	author = {Starikov, Alexander, ed.},
	title = {Design, Process Integration, and Characterization for Microelectronics},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4692},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4692}
}