00535nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245008600115260003200201300002000233490003300253856010300286IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819443236 (Print)  cIIA Library  aFranzon, Paul, ed. 0aDesign, Characterization, and Packaging for MEMS and Microelectronics IIh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4593  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4593yClick Here to Access eBook