Franzon, Paul, ed. <br/><br/>
Design, Characterization, and Packaging for MEMS and Microelectronics II  [eBook] 

 - Washington, USA  SPIE  2001 
 - Online resource 
 - Proceedings of SPIE; V. 4593 .
<br/><br/><label>ISBN: </label>9780819443236 (Print)