@book{24572,
	author = {Franzon, Paul, ed.},
	title = {Design, Characterization, and Packaging for MEMS and Microelectronics II},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4593},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4593}
}