TY  - BOOK
AU  - Courtois, Bernard, ed.
TI  - Design, Characterization, and Packaging for MEMS and Microelectronics
T2  - Proceedings of SPIE; V. 3893
SN  - 9780819434944 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3893
ER  -