Courtois, Bernard, ed. <br/><br/>
Design, Characterization, and Packaging for MEMS and Microelectronics  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3893 .
<br/><br/><label>ISBN: </label>9780819434944 (Print)